型号

Model

FD200T

光学系统

Optical system

无限远平行光路系统

Infinity parallel optical system

观察头

Observe head

铰链式三目观察头， 30°倾斜

Compensation free trinocular head, Inclined at 30 °

正像观察，瞳间距调节范围54-76mm

Erected image，interpupillary adjustable Distance 54-76mm

两档分光比100:0或0:100

Camera :eyepiece 100:0 or 0:100

目镜

Eyepiece

高眼点大视野平场目镜10X/25,视度可调

Large field of view plan eyepiece 10X/25, diopter ±5

长工作距平场消色差物镜

LWD plan achromatic objective

倍率

Magnification

数值孔径

NA

工作距离

WD

F”

5X

0.15mm

12mm

200mm

10X

0.3mm

16mm

200mm

20X

0.4mm

12mm

200mm

50X

0.55mm

9mm

200mm

转换器

Nosepiece

内向式四孔转换器

Quadruple (Backward ball bearing inner locating)

电动调焦机构

Electric driven focusing system

电动调焦，三档调焦精度可选（X1,X10,X100）

Electric focusing system. third gear coarse and fine focusing

1um调焦精度

1um accuracy

5个存储记忆调焦位置，可直接调用到当前焦距

5 memory focusing positions ,use can recall to current focal length

LCD触摸屏设计

LCD touch operation panel

载物台

Working stage

线轨结构工作台，X轴方向110mm，Y轴方向102mm

Rail structure XY working distance，X： 110mm，Y：102mm

平台尺寸：220*180mm

Base size：220*180mm

玻璃窗尺寸：145*115mm

Glass：145*115mm

机台工作行程

Operation space

80mm超大行程，可兼容长工作距APO物镜

80mm big distance，Can be used with LWD APO objective

落射照明系统

Reflected illumination System

6W LED灯，255级数字亮度可调

6W LED light，brightness adjustable

内置可调视场光栏和孔径光栏

Integrated with aperture iris diaphragm and field iris diaphragm

内置匀光插板

Ground glass

透射照明系统

Transmitted illumination System

透射柯勒照明6W带可调光栏

6W Kohler illumination with iris diaphragm

电源

Power supply

DC24V 5A

摄影附件

CCD adapter

标配1X接筒，C型可调接口，选配0.5X 适用于一英寸相机

Standard 1X， 0.5X optional suitable for 1 inch sensor camera

可选附件

Optional accessory

偏光插片一套，滤色片插板（颜色定制）

Polarizer, Analyzer with field iris diaphragm，Flashboard type Filters(green, blue, yellow is for optional)

可选平台

Stage optional

晶圆旋转平台4寸，6寸，8寸，10寸

Wafer rotating working stage 4inch，6inch，8inch，10inch